Modeling of extrinsic parasitic elements of Si based GaN HEMTs using two step de-embedding structures

Modeling of extrinsic parasitic elements of Si based GaN HEMTs using two step de-embedding structures A new parasitic elements extraction technique for GaN HEMT transistors on Si substrate is presented. This technique is based on the use of two de-embedding GaN structures: open and thru-short. The equivalent circuit models along with the extraction procedure are detailed. A very good agreement between measurements and simulations validate the developed extraction method.